Novel Mechanically Fully Decoupled Six-Axis Force-Moment Sensor
نویسندگان
چکیده
منابع مشابه
Silicon Piezoresistive Six-Degree of Freedom Micro Force-Moment Sensor
In this paper, we describe the design, fabrication and calibration results of a 6-degree of freedom force-moment micro sensing chip utilizing the piezoresistance effect in silicon. The sensing chip is designed to be able to simultaneously detect three components of force and three components of moment in three orthogonal directions. Conventional p-type and four-terminal p-type piezoresistors ha...
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High performance force sensors often encounter the conflicting requirements of fine sensitivity and wide bandwidth. While there is an intrinsic tradeoff between these two metrics that cannot be physically avoided for any force transducer, through proper optimization the product of these two can be maximized. Similarly, the requirements of multiple sensing axes and overall compactness are also o...
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ژورنال
عنوان ژورنال: Sensors
سال: 2020
ISSN: 1424-8220
DOI: 10.3390/s20020395